< Back to previous page

Project

Cofunding core facility - Nano- and Microfabrication (NaMiFab) (NaMiFab)

NaMiFab brings together the processing equipment and expertise for Nano- and
Microfabrication of three UGent research groups from the departments INTEC (EA05) and ELIS (EA06) (Faculty of Engineering and Architecture):
• Photonics Research Group (PRG)
• Centre for Microsystems Technology (CMST)
• Liquid Crystals and Photonics Group (LCP)
About 100 tools, used for fabrication and characterization at the nano- and micrometer scale, are located in the Ghent University cleanroom building at campus Ardoyen. This extensive set of instruments is relevant for e.g. applications in photonics, micro- and nanoelectronics, material research and biomedical engineering.

Date:1 Mar 2023 →  Today
Keywords:Microfabrication, Cleanroom processing, Nanofabrication
Disciplines:Micro- and nanoelectromechanical systems, Nanofabrication and nanomanufacturing, Nanoelectronics, Microfabrication and manufacturing, Nanophotonics