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Project
IOF Accelerator: μFlow Cel. (IOFACC8)
VUB is investing in a new cleanroom in Etterbeek which will host an open access Core Facility in Microfabrication of Microfluidics in Glass (MICROLAB).
MICROLAB will have state-of-the-art deep reactive ion etching (DRIE) and peripheral equipment.
The μFlow Cell now proposes to invest in a state-of-the-art lithography equipment making use of the GEAR-Accelerator. This unique instrument allows to pattern the required structure directly onto the photoresist with laser technology. Such machine therefore no longer needs external masks, reducing significantly the cost and turnaround times. Moreover it has a much better accuracy, which is essential for the microfabrication of microfluidics. Last but not least, in the future it will become possible to write 3D structures with this unique machine.
MICROLAB will have state-of-the-art deep reactive ion etching (DRIE) and peripheral equipment.
The μFlow Cell now proposes to invest in a state-of-the-art lithography equipment making use of the GEAR-Accelerator. This unique instrument allows to pattern the required structure directly onto the photoresist with laser technology. Such machine therefore no longer needs external masks, reducing significantly the cost and turnaround times. Moreover it has a much better accuracy, which is essential for the microfabrication of microfluidics. Last but not least, in the future it will become possible to write 3D structures with this unique machine.
Date:1 Jan 2022 → 30 Jun 2023
Keywords:innovation, clean room
Disciplines:Innovation and technology management
Project type:Collaboration project