Atomic layer deposition of Al2O3 using aluminum triisopropoxide (ATIP) : a combined experimental and theoretical study(2019)Authors: Ba Tai Truong, Li'ao Cao, Felix Mattelaer, Geert Rampelberg, Fatemeh SM Hashemi, Jolien Dendooven, J Ruud van Ommen, Christophe Detavernier
Pages: 485 - 494
