< Back to previous pagePublication Design Method for the Integration of DSA Via Patterning in sub-7 nm Circuits Book Contribution - Book Chapter Conference ContributionBook: Proc. INC12Institutional Repository URL: https://lirias.kuleuven.be/1733134ArticleNumber: P04 Accessibility:ClosedAuthors/publisherIoannis Karageorgos (First author)Julien Ryckaert (Author)Kris Croes (Author)C Tung (Author)H-S Wong (Author)Evangelos Karageorgos (Author)Roel Gronheid (Author)Joost Beckaert (Author)Geert Vandenberghe (Author)Michele Stucchi (Author)Wim Dehaene (Last author)Research unitsElectronic Circuits and Systems (ECS)(Division)KU LeuvenEventsInternational Nanotechnology Conference - INC()Leuven, Belgium