< Back to previous page
Publication
Atomic layer deposition of Al2O3 using aluminum triisopropoxide (ATIP) : a combined experimental and theoretical study
Journal Contribution - Journal Article
Journal: JOURNAL OF PHYSICAL CHEMISTRY C
ISSN: 1932-7447
Issue: 1
Volume: 123
Pages: 485 - 494
Publication year:2019
BOF-keylabel:yes
IOF-keylabel:yes
BOF-publication weight:3
CSS-citation score:1
Authors:International
Authors from:Higher Education
Accessibility:Closed