Controlled growth orientation of carbon nanotube

We present a novel method for controlling the growthorientation of individual carbon nanotube (CNT)microstructures on a silicon wafer substrate. Our methodcontrols the CNT forest orientation by patterning thecatalyst layer used in the CNTs growth on slanted KOHedges. The overlap of catalyst area on the horizontalbottom and sloped sidewall surfaces of the KOH-etchedsubstrate enables precise variation of the growth direction.These inclined structures can profit from the outstandingmechanical, electrical, thermal, and optical properties ofCNTs and can therefore improve the performance ofseveral MEMS devices. Inclined CNT microstructurescould for instance be used as cantilever springs in probecard arrays, as tips in dip-pen lithography, and as sensingelement in advanced transducers.

ISBN:9781424441938

Publication year:2009