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Publication
Thermal stability of Zr-O-N(:Ti) thin films prepared by magnetron sputtering
Journal Contribution - Journal Article
Journal: VACUUM
ISSN: 0042-207X
Volume: 151
Pages: 148 - 155
Publication year:2018
BOF-keylabel:yes
IOF-keylabel:yes
BOF-publication weight:0.1
CSS-citation score:1
Authors:International
Authors from:Higher Education
Accessibility:Closed