VFTLP characteristics of ESD protection diodes in advanced bulk FinFET technology

Beyond 20nm nodes, bulk Fin FET is the mainstream technology; however, new process options can result in significant impacts on intrinsic ESD performance. In this work, we study on vfTLP characteristics of two types of ESD diodes. The corresponding TCAD simulations bring an in-depth understanding on the physical mechanism of these ESD diodes.

ISBN:1585372722

Publication year:2015

BOF-keylabel:yes

IOF-keylabel:yes

Authors from:Government, Higher Education