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Publication

Thermal and plasma-enhanced atomic layer deposition of yttrium oxide films and the properties of water wettability

Journal Contribution - Journal Article

Journal: ACS APPLIED MATERIALS & INTERFACES

ISSN: 1944-8252

Issue: 2

Volume: 12

Pages: 3179 - 3187

Publication year:2020

WoS Id: 000508464500132
Handle: http://hdl.handle.net/1854/LU-8641774
DOI: https://doi.org/10.1021/acsami.9b18412

Accessibility:Closed