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Publication
Insight into Selective Surface Reactions of Dimethylamino-trimethylsilane for Area-Selective Deposition of Metal, Nitride, and Oxide
Journal Contribution - Journal Article
Journal: Journal of Physical Chemistry C
ISSN: 1932-7447
Issue: 13
Volume: 124
Pages: 7163 - 7173
Publication year:2020
BOF-keylabel:yes
IOF-keylabel:yes
BOF-publication weight:2
CSS-citation score:2
Authors from:Government, Higher Education
Accessibility:Open