< Back to previous page
Publication
Transient pull-in simulation of electrostatic microvalve with physics-based contact function
Book Contribution - Book Chapter Conference Contribution
Book: 2021 22nd International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
Pages: 1 - 5
Number of pages: 5
ISBN:978-1-6654-1373-2
Publication year:2021
BOF-keylabel:yes
IOF-keylabel:yes
Authors from:Government, Higher Education
Accessibility:Open