< Back to previous page

Publication

Low-voltage silicon photonic MEMS switch with vertical actuation

Book Contribution - Book Chapter Conference Contribution

Book: 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)

Pages: 298 - 301

ISBN:9781665419123

Publication year:2021

WoS Id: 000667731600072
Handle: http://hdl.handle.net/1854/LU-8703698

Accessibility:Open