Design and Application of Piezoelectric MEMS Speakers

Speakers have a wide application in our daily life. According to the characteristics of micromachining technology, MEMS microspeakers not only can achieve further size and cost reduction, but also have the capability of batch fabrication. Recently, piezoelectric type microspeakers with the advantages of large driving force, low power consumption, and single diaphragm structure are gradually attracting attention, which can be fabricated using the MEMS processes.Piezoelectric materials provide a promising solution for MEMS microspeakers.This study will present the structure design and fabrication to realize the piezoelectric MEMS microspeaker with high output power and high SPL.