< Back to previous page

Publication

CNT EUV pellicle tunability and performance in a scanner-like environment

Book Contribution - Book Chapter Conference Contribution

Book: EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY XII
Number of pages: 21
ISBN:978-1-5106-4051-1

Authors/publisher

  • Marina Y Timmermans (First author)
  • Ivan Pollentier (Author)
  • Maxim Korytov (Author)
  • Thomas Nuytten (Author)
  • Stefanie Sergeant (Author)
  • Thierry Conard (Author)
  • Johannes Meersschaut (Author)
  • Yide Zhang (Author)
  • Masoud Dialameh (Author)
  • Wilfried Alaerts (Author)
  • Ehsan Jazaeri (Author)
  • Valentina Spampinato (Author)
  • Alexis Franquet (Author)
  • Steven Brems (Author)
  • Cedric Huyghebaert (Author)
  • Emily E Gallagher (Last author)
  • NF Felix (Editor)
  • A Lio (Editor)

Research units

Events

  • Conference on Extreme Ultraviolet (EUV) Lithography XII()

    ELECTR NETWORK