< Back to previous page

Publication

Carbon nanotube EUV pellicle tunability and performance in a scanner-like environment

Journal Contribution - Journal Article

Journal: Journal of Micro-Nanolithography, MEMS, and MOEMS

ISSN: 1932-5150

Issue: 3

Volume: 20

WoS Id: 000703599200005
DOI: https://doi.org/10.1117/1.jmm.20.3.031010
Institutional Repository URL: https://lirias.kuleuven.be/3623188

Accessibility:Closed