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Project
An in-situ study of Molecular Layer Deposition of metalcone films and
The growth mechanism, conformality and transformation into nanoporous films of metalcone films will be studied using several in-U+2010situ characterization techniques. Central topics for this research are the bonding of the organic precursor ,with the surface, the conformality on
high aspect ratio structures and the porosity of
the transformed metalcone layers.
Date:1 Oct 2012 → 30 Sep 2016
Keywords:Molecular layer deposition (MLD), metalcones, thin films, Atomic Layer Deposition (ALD), nanoporous films, hybrid organic--U+2010inorganic films
Disciplines:Condensed matter physics and nanophysics