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In-situ investigation of novel approaches for the conformal deposition of complex oxides by combining ALD with solid-state and electrochemical reactions

We investigate the synthesis of conformal films of

complex oxides by combining atomic layer deposition with solid-state and

electrochemical reactions. Additionally, we study the structural and/or

phase changes during these reactions using in-situ methods such as X-ray

diffraction and ellipsometry.

Date:1 Oct 2013  →  30 Sep 2017
Keywords:XRD, oxides, ALD, in situ
Disciplines:Condensed matter physics and nanophysics