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Project
In-situ investigation of novel approaches for the conformal deposition of complex oxides by combining ALD with solid-state and electrochemical reactions
We investigate the synthesis of conformal films of
complex oxides by combining atomic layer deposition with solid-state and
electrochemical reactions. Additionally, we study the structural and/or
phase changes during these reactions using in-situ methods such as X-ray
diffraction and ellipsometry.
Date:1 Oct 2013 → 30 Sep 2017
Keywords:XRD, oxides, ALD, in situ
Disciplines:Condensed matter physics and nanophysics