Study of ALD barrier layers for the embedding of electronic and opto-electronic components in a smart microsystem in direct contact with the human body.

Microsystems in direct contact with the human body are only being introduced at a slow rate due to high demands on safety. In this project we want to demonstrate that a stack of thin oxide and/or nitride layers, produced using ‘atomic layer deposition’, can generate a reliable biocompatible and biostable barrier, that could enable introduction of smart biomedical microsystems.