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Publication

The co-reactant role during plasma enhanced atomic layer deposition of palladium

Journal Contribution - Journal Article

Journal: PHYSICAL CHEMISTRY CHEMICAL PHYSICS

ISSN: 1463-9084

Issue: 16

Volume: 22

Pages: 9124 - 9136

Publication year:2020

WoS Id: 000537175100085
DOI: https://doi.org/10.1039/d0cp00786b
Handle: http://hdl.handle.net/1854/LU-8660848

Accessibility:Closed