< Back to previous pagePublication Plasma-enhanced atomic layer deposition of transition metal phosphates Book - DissertationPublication year:2017Handle: http://hdl.handle.net/1854/LU-8534242 Accessibility:OpenAuthors/publisherThomas Dobbelaere (Author)Ghent University. Faculty of Sciences (Publisher)Ghent University, Sint-Pietersnieuwstraat 25, 9000 Gent, Belgium (Partner)