Publication

Plasma enhanced atomic layer deposition of zinc sulfide thin films

Journal: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

ISSN: 1520-8559

Issue: 1

Volume: 35

Publication year:2017

BOF-keylabel:yes

IOF-keylabel:yes

BOF-publication weight:0.1

CSS-citation score:2

Authors:National

Authors from:Higher Education

Accessibility:Open