Publications
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Chapter 15 University of Antwerp
Computing the H2 norm of large-scale time-delay systems KU Leuven
The H2 norm of an appropriately defined transfer function plays an important role in the field of systems and control, as a robustness measure with respect to noise or external disturbances. For a time-delay system the H2 norm of a transfer function can be approximated by rewriting the time-delay system as an infinite-dimensional linear system and applying a spectral discretization to become a system without delay. The H2 norm of this (larger) ...
H2 plasma and neutral beam treatment of EUV photoresist KU Leuven
© 2015 SPIE. Optical lithography has given the semiconductor industry the chance to follow Mooreâ™s law in scaling the transistor dimensions and consequently stacking them in a more dense way. However, for present sub 20 nm nanoscale patterns, which are reaching molecular dimensions; controlling the line edge and width roughness (LER/LWR) has become a key challenge. One way of reducing the roughness at photoresist level is the exposure of the ...
Smooth stabilization and optimal H2 design KU Leuven
In this paper we propose two smooth optimization methods, one that can stabilize a system, and the other that can perform a stabilization as well as solve the optimal $H_2$-norm design problem. For both methods, we make use of the smoothed spectral abscissa, a stabilization measure which originates from the inversion of an $H_2$-norm type function, and that behaves as a smooth approximation of the spectral abscissa. In this way, we can set up an ...