Investigation of In-use Stiction and Adhesion in Poly-SiGe MEMS KU Leuven
The aim of this research is to investigate stiction and adhesion of MEMS and MEMS packages using various test structures and techniques. This requires the ...
In recent years, interests in MEMS resonators have grown rapidly, thanks to the rapid development of microfabrication techniques, including vacuum packaging processes. MEMS resonators are employed as the key building block in a wide range of applications such as sensors[1]-[4], time references[5,6], and filters[7]-[10]. Among those applications, MEMS resonator-based sensors, such as resonant accelerometers [11]-[13] provide an exciting ...
Speakers have a wide application in our daily life. According to the characteristics of micromachining technology, MEMS microspeakers not only can achieve further size and cost reduction, but also have the capability of batch fabrication. Recently, piezoelectric type microspeakers with the advantages of large driving force, low power consumption, and single diaphragm structure are gradually attracting attention, which can be fabricated using ...
In MEMS sensors, the natural frequency of the structure is designed to be sensitive to the quantity of interest; it is monitored by placing the resonator in an oscillator loop and comparing the oscillation frequency to that of a reference oscillator. If the reference oscillator has the same sensitivity to environmental drifts as the one used for sensing, a differential measurement of the quantity of interest can be obtained. To avoid ...
The thesis will focus on application and research of piezoelectrical mems resonator, especially on performance of PMUTs based loudspeaker.
The purpose of this PhD is to design, process and characterize capacitive MEMS in the Large Area Electronics platform, capable of forming 2D sensing and actuation arrays. Key challenges to be addressed are the development of efficient capacitive devices with thin-film technologies reaching state-of-the-art signal to noise ratio at the individual element.
Despite the plethora of electronics and transducers that exists nowadays, most of them are rigid. This is a consequence of the fact that they are mainly based on silicon, which is a stiff and brittle material by nature. The rigidity limits their capabilities and is currently restricting the development of e.g. wearable electronics, medical equipment and internet of things applications. Flexible and stretchable electronics would eliminate ...
This project has received funding from the European Union’s EU Framework Programme for Research and Innovation Horizon Europe under Grant Agreement No 101072845. This position will be for the project SENNET RR9 with KU Leuven and Christian-Albrechts-Universität zu Kiel. Objectives: Design, fabricate and test novel MOF-functionalised resonators for gravimetric VOC sensing. To investigate and employ this approach for gas sensing applications. ...