Investigation of In-use Stiction and Adhesion in Poly-SiGe MEMS (Onderzoek naar stictie en adhesie van poly-SiGe MEMS) KU Leuven
One of the major trends in todays microelectronic industry is adding more and more functionality into electronic devices without compromising their size, performance and manufacturing costs. Usually, this is done by merging various components into one single chip. A very good example is the integrated miniaturized electromechanical micro devices technology, based on micro-electro-mechanical-systems (MEMS). MEMS are replacing conventional devices ...