HEtrogenous, 3D microsystems processing Line for Complex multidisciplinary device research (LENA CLEAN ROOM) KU Leuven
During the last decades more and more researchers from a wide variety of fields have become interested in investigating very fine structures, having components as small as a millionth of a meter and even below. This started with the advent of microelectronics several decades ago. Now, also biologists, (bio)chemists, physicists and sensor researchers feel the need to work with microtechnology. Thus, it is important that the equipment for fabricating such structures is available to researchers. The main applicants for this project have been building up a microfabrication lab for decades. ...