An Energy-Efficient Capacitance-Controlled Oscillator-based Sensor Interface for MEMS sensors KU Leuven
This paper presents the optimization and implementation of an area- and energy-efficient capacitance-controlled oscillator-based sensor interface, which outputs a period-modulated signal. This time-based output signal can easily be digitized with a reset counter, which benefits from firstorder quantization noise shaping and oversampling. The circuit is prototyped in 130-nm CMOS technology and takes only 0.05 mm2. The performance is validated ...