Physics of Dielectric Breakdown Revealed by Low Frequency Noise Spectroscopy KU Leuven
Dielectric breakdown is the physical phenomenon wherein a dielectric material loses its insulating properties, due to a prolonged exposure to an applied stress, after which it eventually starts to conduct electricity. It is one of the main failure mechanisms of Back End Of Line (BEOL) dielectrics in interconnect systems, giving rise to several reliability issues for semiconductor devices that are expected to work for at least ten years under ...