TOPTRANS: a micro-transfer printing instrument with sub-micron alignment accuracy on a large scale for the electronic/photonic microsystems of the future (TOPTRANS) Ghent University
TOPTRANS: a micro-transfer printing instrument with sub-micron alignment accuracy on a large scale for the electronic/photonic microsystems of the future
The instrument allows the integration of so-called 'chiplets' on a substrate with very high alignment accuracy (+/- 0.5micron 3 sigma). This fits into the trend of heterogeneous integration where bringing together components implemented in different material systems allows to increase the performance of the resulting system. In the first place, we look here at photonic systems on chip where, for example, III-V semiconductor ...