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Experimental validation of the reproducibility of a position measurement system with nanometre uncertainty

Boekbijdrage - Boekhoofdstuk Conferentiebijdrage

Machine tools require ever increasing accuracies. A metrology system using linear encoders according to the Abbe-principle and functional separation of the structural and metrology loop, called ‘moving-scales’, has been developed to address this requirement. This work shows the experimental results of the thermal stability of a 1-DOF moving-scale system on a dedicated measurement setup.
Boek: Proceedings of the 14th euspen international conference
Pagina's: 357 - 360
ISBN:978-0-9566790-3-1
Jaar van publicatie:2014
Toegankelijkheid:Closed