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Optical phonon lifetimes in sputtered AlN thin films

Tijdschriftbijdrage - Tijdschriftartikel

We study the vibrational properties of AlN thin films deposited on silicon (100) substrates by the reactive DC-pulsed magnetron sputtering. The frequencies and lifetimes of the E-1(TO) and A(1)(LO) optical phonons are calculated from Fourier transform infrared spectra using the factorized model of a damped oscillator. We analyze the structural properties by the x-ray diffraction technique to correlate the elongation of phonon lifetimes with increasing film thickness. The lifetimes of the phonon modes in AlN thin films are compared to the values in a single crystal. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4711773]
Tijdschrift: Applied physics letters
ISSN: 0003-6951
Issue: 19
Volume: 100
Pagina's: Article 191906
Jaar van publicatie:2012
Trefwoorden:Applied Physics
BOF-keylabel:ja
IOF-keylabel:ja
BOF-publication weight:1
CSS-citation score:1
Authors from:Government, Higher Education, Private
Toegankelijkheid:Closed