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Heterogeneous integration in silicon photonics through micro-transfer-printing

Boekbijdrage - Boekhoofdstuk Conferentiebijdrage

Micro-transfer-printing enables the intimate integration of a wide range of opto-electronic micro-components on a silicon photonics platform. This technique allows for wafer-scale integration in a massively parallel manner with high alignment accuracy, high throughput and high yield, therefore leading to a cost reduction of complex photonic integrated circuits.
Boek: 2019 24th Microoptics Conference (MOC)
Pagina's: 64 - 65
ISBN:9784863487123
Jaar van publicatie:2019