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Octrooi

Characterization of regions with different crystallinity in materials

A method (200) for characterizing a region in a sample under study is described. The sample under study comprising a first region having first crystalline properties and a second region having second crystalline properties. The method (200) comprises irradiating (210) the sample under study with an electron beam, the average relative angle between the electron beam and the sample under study being selected so that a contribution in the backscattered or forward scattered signal of the first region is distinguishable from that of the second region, detecting (220) the backscattered or forward scattered electrons, and deriving (230) a characteristic of the first and/or the second region from the detected backscattered or forward scattered electrons. The instantaneous relative angle α between the electron beam and the sample under study is modulated with a predetermined modulation frequency during said irradiating (210) and detecting (220) is performed at the predetermined modulation frequency.
Octrooi-publicatienummer: WO2018122015
Jaar aanvraag: 2017
Jaar toekenning: 2019
Jaar van publicatie: 2018
Status: Aangevraagd
Technologiedomeinen: Elektrische machines, apparaten, energie, Meting
Gevalideerd voor IOF-sleutel: Ja
Toegewezen aan: Associatie KULeuven