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Octrooi

Method for determining the shape of a sample tip for atom probe tomography

The disclosed technology relates to a method and apparatus for correctly positioning a probe suitable for scanning probe microscopy (SPM). The probe is positioned relative to the apex region of a needle-shaped sample, such as a sample for atom probe tomography, in order to perform a SPM acquisition of the apex region to obtain an image of the region. In one aspect, the positioning takes place by an iterative process, starting from a position wherein one side plane of the pyramid-shaped SPM probe interacts with the sample tip. By controlled consecutive scans in two orthogonal directions, the SPM probe tip approaches and finally reaches a position wherein a tip area of the probe interacts with the sample tip's apex region.
Octrooi-publicatienummer: US10746759
Jaar aanvraag: 2020
Jaar toekenning: 2020
Jaar van publicatie: 2020
Status: Toegewezen
Technologiedomeinen: Elektrische machines, apparaten, energie, Meting
Gevalideerd voor IOF-sleutel: Ja
Toegewezen aan: Associatie KULeuven