Integrating hybrid crystalline materials into electronic devices via microfabrication

In the last decades, novel organic-inorganic hybrid materials have emerged, exhibiting great potential to develop advanced electronic devices in different fields. However, due to the distinct chemical and physical properties, which are different to traditional inorganic materials, conventional fabrication techniques cannot be applied to those novel organic-inorganic hybrid materials directly. For example, most organic-inorganic hybrid materials are unstable in non-neutral solvents. The chemicals, such as photoresist, developer and stripper required during the photolithography, which can degrade the hybrid materials. Therefore, developing new device fabrication strategies for those emerging materials is in high demand. Our work is based on cleanroom microfabrication techniques. Specifically designed strategies have been developed to achieve the integration of inorganic-organic hybrid materials (including both films and single crystals) into electronic devices, according to the chemical and physical properties of the target materials.

Jaar van publicatie:2023

Toegankelijkheid:Open