- Selective Metal Deposition for Advanced Metallization Schemes(2020)
Auteurs: Ivan Zyulkov, Stefan De Gendt
- Area-Selective ALD of Ru on Nanometer-Scale Cu Lines through Dimerization of Amino-Functionalized Alkoxy Silane Passivation Films(2020)
Auteurs: Ivan Zyulkov, Stefan De Gendt
Pagina's: 4678 - 4688
Aantal pagina's: 11
- Selective electroless deposition of cobalt using amino-terminated SAMs(2019)
Auteurs: Ivan Zyulkov, Stefan De Gendt
Pagina's: 4392 - 4402
Aantal pagina's: 11
- High sensitivity Rutherford backscattering spectrometry using multidetector digital pulse processing(2018)
Auteurs: Grazia Laricchiuta, Wilfried Vandervorst, Ivan Zyulkov, Silvia Armini, Johannes Meersschaut
Aantal pagina's: 5
- Use of high order precursors for manufacturing gate all around devices(2017)
Auteurs: A Hikavyy, Ivan Zyulkov, H Mertens, L Witters, R Loo, N Horiguchi
Pagina's: 24 - 29
Aantal pagina's: 6
- Selective Ru ALD as a Catalyst for Sub-Seven-Nanometer Bottom-Up Metal Interconnects(2017)
Auteurs: Ivan Zyulkov, Mikhail Krishtab, Stefan De Gendt
Pagina's: 31031 - 31041
