Onderzoeker
Michiel Van Daele
- Disciplines:Fysica van gecondenseerde materie en nanofysica
Affiliaties
- Vakgroep Vastestofwetenschappen (Departement)
Lid
Vanaf6 jul 2015 → 26 sep 2021
Publicaties
11 - 20 van 34
- Atomic layer deposition of localized boron- and hydrogen-doped aluminum oxide using trimethyl borate as a dopant precursor(2020)
Auteurs: Felix Mattelaer, Michiel Van Daele, Matthias Minjauw, Mikko Nisula, Simon D. Elliott, Timo Sajavaara, Jolien Dendooven, Christophe Detavernier
Pagina's: 4152 - 4165 - Study of the surface species during thermal and plasma-enhanced atomic layer deposition of titanium oxide films using in situ IR-spectroscopy and in vacuo X-ray photoelectron spectroscopy(2020)
Auteurs: Sofie Vandenbroucke, Elisabeth Levrau, Matthias Minjauw, Michiel Van Daele, Eduardo Solano Minuesa, Rita Vos, Jolien Dendooven, Christophe Detavernier
Aantal pagina's: 1 - Study of the surface species during thermal and plasma-enhanced atomic layer deposition of titanium oxide films using in situ IR-spectroscopy and in vacuo X-ray photoelectron spectroscopy(2020)
Auteurs: Sofie Vandenbroucke, Elisabeth Levrau, Matthias Minjauw, Michiel Van Daele, Eduardo Solano Minuesa, Rita Vos, Jolien Dendooven, Christophe Detavernier
Pagina's: 9262 - 9271 - Atomic layer deposition of platinum and gold(2020)
Auteurs: Michiel Van Daele
- Surface mobility and impact of precursor dosing during atomic layer deposition of platinum : in situ monitoring of nucleation and island growth(2020)
Auteurs: Jolien Dendooven, Michiel Van Daele, Eduardo Solano, Ranjith Karuparambil Ramachandran, Matthias Minjauw, Andrea Resta, Alina Vlad, Yves Garreau, Alessandro Coati, Giuseppe Portale, et al.
Pagina's: 24917 - 24933 - Chemical and structural configuration of Pt-doped metal oxide thin films prepared by atomic layer deposition(2019)
Auteurs: Ranjith Karuparambil Ramachandran, Matthias Filez, Eduardo Solano Minuesa, Hilde Poelman, Matthias Minjauw, Michiel Van Daele, Ji-Yu Feng, Andrea La Porta, Thomas Altantzis, Emiliano Fonda, et al.
Pagina's: 9673 - 9683 - Near room temperature plasma enhanced atomic layer deposition of gold metal(2019)
Auteurs: Michiel Van Daele, Matthew BE Griffiths, Ali Raza, Matthias Minjauw, Seán T Barry, Roel Baets, Christophe Detavernier, Jolien Dendooven
Aantal pagina's: 1 - Near room temperature plasma enhanced atomic layer deposition of gold metal(2019)
Auteurs: Michiel Van Daele, Matthew BE Griffiths, Ali Raza, Matthias Minjauw, Seán T Barry, Roel Baets, Christophe Detavernier, Jolien Dendooven
Aantal pagina's: 1 - Plasma-enhanced atomic layer deposition of nanostructured gold near room temperature(2019)
Auteurs: Michiel Van Daele, Matthew BE Griffiths, Ali Raza, Matthias Minjauw, Eduardo Solano, Ji-Yu Feng, Ranjith Karuparambil Ramachandran, Stéphane Clemmen, Roel Baets, Seán T Barry, et al.
Pagina's: 37229 - 37238 - Integrated silicon nitride electro-optic modulators with atomic layer deposited overlays(2019)
Auteurs: Artur Hermans, Michiel Van Daele, Jolien Dendooven, Stéphane Clemmen, Christophe Detavernier, Roel Baets
Pagina's: 1112 - 1115