A device for measuring surface characteristics of a material

The invention is related to a device (1) for electrically measuring surface characteristics of a sample (8). The device comprises at least one group of three electrodes : a first and second electrode (2,3) spaced apart from each other and configured to be placed onto the surface of the sample, and a third electrode (5) between the first two but isolated from these two electrodes by a one or more first insulators (6a), wherein a second insulator (6b) further isolates the central electrode from the sample when the device is placed thereon. The three electrodes and the insulators are attached to a single or to multiple holders (7) with conductors (9) incorporated therein for allowing the coupling of the electrodes to power sources or measurement tools. The placement of the device (1) onto a semiconductor sample (8) creates a transistor with the sample surface acting as the channel. The device thereby allows to determine the transistor characteristics of the sample in a straightforward way.

Octrooi-publicatienummer: EP3599471

Jaar aanvraag: 2020

Jaar toekenning: 2021

Jaar van publicatie: 2020

Status: Aangevraagd

Technologiedomeinen: Meting

Gevalideerd voor IOF-sleutel: Ja

Toegewezen aan: Associatie KULeuven