Formation of diamond membranes

In a first aspect, the present invention relates to a method for forming a diamond membrane (410), comprising:a. providing a substrate (100) having an amorphous dielectric layer (200) thereon, the amorphous dielectric layer (200) comprising an exposed surface (220), the exposed surface (220) having an isoelectric point of less than 7, preferably at most 6;b. seeding diamond nanoparticles (300) onto the exposed surface (220);c. growing a diamond layer (400) from the seeded diamond nanoparticles (300); andd. removing a portion (600) of the substrate (100) from underneath the diamond layer (400), the removed portion (600) extending at least up to the amorphous dielectric layer (200), thereby forming the diamond membrane (410) over the removed portion (600).

Octrooi-publicatienummer: EP3556454

Jaar aanvraag: 2019

Jaar toekenning: 2020

Jaar van publicatie: 2019

Status: Aangevraagd

Technologiedomeinen: Oppervlaktetechniek, coating, Chemische ingenieurswetenschappen en techniek

Gevalideerd voor IOF-sleutel: Ja

Toegewezen aan: Associatie Universiteit - Hogescholen Limburg