METHOD USED FOR FABRICATING PYROLYZED CARBON NANOSTRUCTURES FOR E.G. FABRICATING ENTITY, INVOLVES SUBJECTING POLYMERIC MATERIAL COMPRISING COMPOUND WITH DIFFERENT ETCH RATES TO ETCHING PROCESS AND PYROLYZING POLYMERIC NANOSTRUCTURES

Preferred embodiments provide a method for fabricating pyrolysed carbon nanostructures, the method comprises at least following steps: Providing a substrate, and then Depositing a polymeric material comprising either compounds with different plasma etch rates or compounds that can mask a plasma etching process, and then Subjecting said polymeric material to a plasma etching process (e.g. oxygen plasma) to form polymeric nanostructures and then Pyrolysing said polymeric nanostructures to form carbon nanostructures.

Octrooi-publicatienummer: EP2704990

Jaar aanvraag: 2012

Jaar toekenning: 2015

Jaar van publicatie: 2014

Status: Aangevraagd

Technologiedomeinen: Materialen, metallurgie, Microstructuur en nanotechnologie

Gevalideerd voor IOF-sleutel: Ja

Toegewezen aan: Associatie KULeuven