PROBE CONFIGURATION AND METHOD OF FABRICATION THEREOF

The present invention is related to probe configuration for characterizing a sample, the probe configuration comprising: \n €¢ a holder (707); \n €¢ a cantilever (704) having a base end attached to said holder and a distal end extending away from the holder; \n €¢ a tip (702) being arranged near the distal end of the cantilever, the tip having a shape defined by a base plane, a side surface and an apex, the side surface extending from the base plane up to the apex; \n wherein the tip comprises a diamond body (110,710) and a diamond layer (103,703) covering at least an apex region (108,708), the apex region being a part of the side surface of the solid diamond body (110,710) that starts from and includes the apex. The invention is equally related to a method for fabricating a probe configuration according to the invention.

Octrooi-publicatienummer: EP2869071

Jaar aanvraag: 2014

Jaar toekenning: 2016

Jaar van publicatie: 2015

Status: Aangevraagd

Technologiedomeinen: Meting

Gevalideerd voor IOF-sleutel: Ja

Toegewezen aan: Associatie KULeuven