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Investigations of the surface chemical composition and atomic structure of ex-situ sulfur passivated Ge(100)

Boekbijdrage - Boekhoofdstuk Conferentiebijdrage

Using complementary surface analysis techniques, we have studied the chemical and structural properties of the S/Ge(100) passivation layer formed upon sulfidation in an aqueous (NH4)2S solution. Our experiments have revealed that only S-Ge bonds are formed upon the adsorption of S and that the surface is essentially free of other S-containing species (i.e. Snor SOx). The passivation treatment was found to reduce, but not to fully inhibit Ge-O bonds on the surface. Moreover, we have shown that the top-layer of the passivated surface shows a high degree of disorder even though it is associated with a spotty (1x1) RHEED pattern. Based on our experimental findings, we conclude that the passivation layer can be best described as a thin amorphous GeSxOyfilm atop a partially ordered interfacial layer, a surface model that has been proposed previously in literature. ©The Electrochemical Society.
Boek: Analytical Techniques for Semiconductor Materials and Process Characterization 6 - ALTECH
Pagina's: 421 - 432
ISBN:978-1-56677-740-7
Jaar van publicatie:2009
BOF-keylabel:ja
IOF-keylabel:ja
Authors from:Government, Higher Education