A low-power high-flow shape memory alloy wire gas microvalve

In this paper the use of shape memory alloy (SMA) wire actuators for high gas flow control is investigated. A theoretical model for effective gas flow control is presented and gate microvalve prototypes are fabricated. The SMA wire actuator demonstrates the robust flow control of more than 1600 sccm at a pressure drop of 200 kPa. The valve can be successfully switched at over 10Hz and at an actuation power of 90 mW. Compared to the current state-of-the-art high-flow microvalves, the proposed solution benefits from a low-voltage actuator with low overall power consumption. This paper demonstrate that SMA wire actuators are well suited for high-pressurehigh-flow applications. © 2012 IOP Publishing Ltd.

Jaar van publicatie:2012

BOF-keylabel:ja

IOF-keylabel:ja

BOF-publication weight:1

CSS-citation score:1

Auteurs:International

Authors from:Higher Education