Method for forming a carbon nanotube pellicle membrane. Interuniversitair Micro-Electronica Centrum vzw
The current invention proposes an EUV pellicle design based on free-standing SWCNTs as a core element, fixed onto a pellicle support at the outer edges of a rectangular opening and coated with a capping layer(s). SWCNT films are fabricated by aerosol (floating-catalyst) method which does not modify the pristine unique CNT properties, allowing to form randomly interconnected CNT films with long and thin CNT bundles and good intertube contacts. Such dry-processed free-standing CNTs are positioned on the pellicle frame made of low thermal expansion material and capped by the protective coating ...