Impact of methane concentration on surface morphology and boron incorporation of heavily boron-doped single crystal diamond layers Universiteit Hasselt
The methane concentration dependence of the plasma gas phase on surface morphology and boronincorporation in single crystal, boron-doped diamond deposition is experimentally and computationallyinvestigated. Starting at 1%, an increase of the methane concentration results in an observable increase ofthe B-doping level up to 1.7 1021cm 3, while the hole Hall carrier mobility decreases to0.7±0.2 cm2V 1s 1. For B-doped SCDfilms grown at 1%, 2%, and ...