Deep proton writing with 12 MeV protons for rapid prototyping of microstructures in polymethylmethacrylate Universiteit Gent Vrije Universiteit Brussel
Deep proton writing ( DPW) is a fabrication technology developed for the rapid prototyping of polymer microstructures. We use polymethylmethacrylate (PMMA) substrates, which act as a positive resist, for irradiation with a collimated 12-MeV energy proton beam. Using 12 MeV enables the irradiation of increasingly thick PMMA substrates with less conicity of the sidewalls compared to the lower energies used in previous work. A microhole of 47.7 mu ...