Monolithic III-V-on-silicon opto-electronic phase modulator with a ridge waveguide. Interuniversitair Micro-Electronica Centrum vzw
The present disclosure relates to the field of electro-optical devices. In particular the disclosure provides a monolithic integrated electro-optical phase modulator fabricated by III-V-on-silicon semiconductor processing. The phase modulator comprises a silicon-based n-type substrate base layer, and a III-V n-type ridge waveguide for propagating light, wherein the ridge waveguide protrudes from and extends along the n-type substrate base layer. Further, the phase modulator comprises one or more insulating layers provided on the ridge waveguide, wherein the one or more insulating layers have ...