Thermoelastical characterization of functional thin films on anisotropic substrates KU Leuven
As devices get smaller, a challenge is presented to those who determine the physical properties of the materials used within these devices in a fast and reliable way. This thesis attempts to answer, in part, to that challenge, with a focus on the elastic and, to a lesser extent, thermal properties of thin functional filmsthat are deposited on single crystal substrates. The elastic anisotropy introduced by the single crystal substrate has a major ...