Semiconductor integrated circuit manufactured using a plasma-processing step. Interuniversitair Micro-Electronica Centrum vzw
A semiconductor integrated circuit comprises semiconductor device (1) which has a port to be protected from Plasma-Induced Damage due to an electrical charge that may accumulate at said port during a plasma-processing step. A protection circuit is provided in the integrated circuit, which comprises a discharge path, a control terminal and a plasma pick-up antenna (12) connected to the control terminal. The protection circuit further comprises a bipolar transistor (2) which has a base (B) connected to the control terminal. Such protection circuit is much efficient in allowing a charge transfer ...