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Infrastructure
Optical profilometer - Wyko (Wyko)
A white light interferometer is capable of mapping a several millimeter wide area in a single measurement, with sub-nanometer resolution, providing instantaneous information about surface roughness, shape and waviness.
Type: Equipment
Location type: Single sited
Accessibility: Everyone
User modalities: https://www.ugent.be/namifab/
In use: 1 Jan 2008 → Today
Disciplines: Semiconductor devices, nanoelectronics and technology
Keywords: surface mapping, sub-nanometer resolution, shape analysis, white light interferometry, surface roughness