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Infrastructure

Parylene coater (Parylene coater)

Vacuum-based parylene deposition system for coating wafers and components with uniform, pinhole-free, biocompatible layers.

Type: Equipment
Location type: Single sited
Accessibility: Everyone
User modalities: https://www.ugent.be/namifab/
In use: 1 Jan 2021 →  Today
Url: https://www.ugent.be/namifab/
Disciplines: Semiconductor devices, nanoelectronics and technology
Keywords: biocompatible films, conformal coating, thin film depositon, parylene deposition